drwxr-xr-x 2 jwz jwz 68 Nov 8 13:41 â€ºAÌâ€ eÌ‚iÂ®Ã¸Ë‡ï¬/
drwxr-xr-x 2 jwz jwz 68 Nov 8 13:41 â€ºÃ·eÌ‚iÂ®Ã¸Ë‡ï¬/
drwxr-xr-x 2 jwz jwz 68 Nov 8 13:41 â€ºâ€ eÌ‚iÂ®Ã¸Ë‡ï¬/
Update: These turds are coming from the TWAIN plugin to Photoshop CS2. Deleting "/Applications/Adobe Photoshop CS2/Plug-Ins/Import:Export/TWAIN.plugin" fixes it. It was creating these directories every time Photoshop started up, without any actual scanning being involved.
Logging fs_usage didn't help: when the junk was created, it logged mdimport indexing them, but didn't log the creator process. Setting up an "alert" folder action on the Preferences folder was more useful.